Oriented hydrocarbons transferred from a high performance lubricative amorphous C:H:Si film during sliding in a vacuum

Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters 1990-05, Vol.56 (19), p.1868-1870
Hauptverfasser:	SUGIMOTO, I, MIYAKE, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!