Oriented hydrocarbons transferred from a high performance lubricative amorphous C:H:Si film during sliding in a vacuum

Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high...

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Veröffentlicht in:	Applied physics letters 1990-05, Vol.56 (19), p.1868-1870
Hauptverfasser:	SUGIMOTO, I, MIYAKE, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics
Online-Zugang:	Volltext
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Zusammenfassung:	Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high lubrication performance is attributed to hydrocarbons transferred from the rubbed film to the ball surface and oriented along the sliding direction.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.103072