Oriented hydrocarbons transferred from a high performance lubricative amorphous C:H:Si film during sliding in a vacuum

Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high...

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Veröffentlicht in:Applied physics letters 1990-05, Vol.56 (19), p.1868-1870
Hauptverfasser: SUGIMOTO, I, MIYAKE, S
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container_end_page 1870
container_issue 19
container_start_page 1868
container_title Applied physics letters
container_volume 56
creator SUGIMOTO, I
MIYAKE, S
description Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high lubrication performance is attributed to hydrocarbons transferred from the rubbed film to the ball surface and oriented along the sliding direction.
doi_str_mv 10.1063/1.103072
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ispartof Applied physics letters, 1990-05, Vol.56 (19), p.1868-1870
issn 0003-6951
1077-3118
language eng
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source AIP Digital Archive
subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title Oriented hydrocarbons transferred from a high performance lubricative amorphous C:H:Si film during sliding in a vacuum
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