Ion beam patterning of spin-on metalorganic precursors and formation of high Tc superconductors

An ion-beam method for producing patterned thin films of YBa2Cu3O(7-x) from spin-on metalorganic precursors is proposed. In the present method, spin- coated precursor films are irradiated through a stencil mask with 2.5 MeV He(+) ions and developed in solvent to remove unexposed material. The remaining patterns are then pyrolized. Black films of the perovskite superconductor with pattern dimensions on the millimeter scale are shown to exhibit an orientation with the c axis perpendicular to the film after heat treatments of 990 C for three minutes. The material is characterized by an onset of superconducting transition at 84 K and zero resistivity at 68 K. (R.R.)