Mass-spectrometer controlled coevaporation of Y-Ba-Cu-O thin films on alumina substrates

Thin films of YBa 2Cu 3O 7− x have been fabricated by coevaporation utilizing a quadrupole mass spectrometer rate control system. Sintered alumina substrates have been used and the resistivity transition from the normal to the superconducting state has been studied as a function of different heat tr...

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Veröffentlicht in:Journal of crystal growth 1988-08, Vol.91 (3), p.368-372
Hauptverfasser: Hudner, J., Ohlsén, H., Stolt, L.
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container_title Journal of crystal growth
container_volume 91
creator Hudner, J.
Ohlsén, H.
Stolt, L.
description Thin films of YBa 2Cu 3O 7− x have been fabricated by coevaporation utilizing a quadrupole mass spectrometer rate control system. Sintered alumina substrates have been used and the resistivity transition from the normal to the superconducting state has been studied as a function of different heat treatments. A comparison has also been made between sapphire and sintered alumina substrates.
doi_str_mv 10.1016/0022-0248(88)90253-9
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subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Vacuum deposition
title Mass-spectrometer controlled coevaporation of Y-Ba-Cu-O thin films on alumina substrates
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