Mass-spectrometer controlled coevaporation of Y-Ba-Cu-O thin films on alumina substrates
Thin films of YBa 2Cu 3O 7− x have been fabricated by coevaporation utilizing a quadrupole mass spectrometer rate control system. Sintered alumina substrates have been used and the resistivity transition from the normal to the superconducting state has been studied as a function of different heat tr...
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Veröffentlicht in: | Journal of crystal growth 1988-08, Vol.91 (3), p.368-372 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Thin films of YBa
2Cu
3O
7−
x
have been fabricated by coevaporation utilizing a quadrupole mass spectrometer rate control system. Sintered alumina substrates have been used and the resistivity transition from the normal to the superconducting state has been studied as a function of different heat treatments. A comparison has also been made between sapphire and sintered alumina substrates. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/0022-0248(88)90253-9 |