High-Resolution and High-Sensitivity Flexible Capacitive Pressure Sensors Enhanced by a Transferable Electrode Array and a Micropillar–PVDF Film

Flexible pressure sensors have attracted increasing attention because they can mimic human skin to sense external pressure; however, for mimicking human skin, the sensing of a pressure point is far from sufficient. To realize fully biomimetic skins, it is crucial for flexible sensors to have high resolution and high sensitivity. We conducted simulations and experiments to determine the relationship between the sensor sensitivity and physical parameters, such as the effective relative permittivity and air ratio of the dielectric layer. According to the results, a micropillar–poly­(vinylidene fluoride) (PVDF) dielectric layer was designed to achieve high sensitivity (0.43 kPa–1) in the low-pressure regime (