Attainment of transparent boron-implanted layers for silicon solar cell applications

The formation of boron-doped p+ layers that are transparent to minority-carrier transport is reported. Ion implantation is used to limit the peak dopant concentration to 5×1018 cm−3 so as to avoid deleterious heavy doping effects. Solar cell open circuit voltage of 657 mV has been obtained in this w...

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Veröffentlicht in:Appl. Phys. Lett.; (United States) 1985-10, Vol.47 (7), p.731-732
Hauptverfasser: SPITZER, M. B, KEAVNEY, C. J
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Sprache:eng
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Zusammenfassung:The formation of boron-doped p+ layers that are transparent to minority-carrier transport is reported. Ion implantation is used to limit the peak dopant concentration to 5×1018 cm−3 so as to avoid deleterious heavy doping effects. Solar cell open circuit voltage of 657 mV has been obtained in this way. The importance of surface passivation is indicated.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.96019