C-axis oriented growth of magnetron sputtered YBaCuO thin films on MgO substrates
Highly textured YBaCuO thin films were sputtered on MgO (100)-oriented single crystal substrates at ambient temperature followed by an anneal in oxygen for 1 h at temperatures up to 920 degree C. X-ray diffractograms of the highly textured films indicate an orientation of the c-axis of the YBaCuO la...
Gespeichert in:
Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 1988-08, Vol.46 (4), p.339-341 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Highly textured YBaCuO thin films were sputtered on MgO (100)-oriented single crystal substrates at ambient temperature followed by an anneal in oxygen for 1 h at temperatures up to 920 degree C. X-ray diffractograms of the highly textured films indicate an orientation of the c-axis of the YBaCuO lattice perpendicular to the substrate surface. There are strong indications that the oriented c-axis growth is due to a CuO self-flux effect. Auger measurements reveal a copper diffusion profile into the substrate down to a depth of more than 400 nm. |
---|---|
ISSN: | 0721-7250 0947-8396 1432-0630 |
DOI: | 10.1007/BF01210356 |