C-axis oriented growth of magnetron sputtered YBaCuO thin films on MgO substrates

Highly textured YBaCuO thin films were sputtered on MgO (100)-oriented single crystal substrates at ambient temperature followed by an anneal in oxygen for 1 h at temperatures up to 920 degree C. X-ray diffractograms of the highly textured films indicate an orientation of the c-axis of the YBaCuO la...

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Veröffentlicht in:Applied physics. A, Materials science & processing Materials science & processing, 1988-08, Vol.46 (4), p.339-341
Hauptverfasser: HÄUSER, B, KEIM, E. G, ROGALLA, H, VAN SILFHOUT, A
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Sprache:eng
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Zusammenfassung:Highly textured YBaCuO thin films were sputtered on MgO (100)-oriented single crystal substrates at ambient temperature followed by an anneal in oxygen for 1 h at temperatures up to 920 degree C. X-ray diffractograms of the highly textured films indicate an orientation of the c-axis of the YBaCuO lattice perpendicular to the substrate surface. There are strong indications that the oriented c-axis growth is due to a CuO self-flux effect. Auger measurements reveal a copper diffusion profile into the substrate down to a depth of more than 400 nm.
ISSN:0721-7250
0947-8396
1432-0630
DOI:10.1007/BF01210356