The frequency response of the effective resistance of thin chromium and tin films
A study was made of the frequency response of the effective resistance of a high resistivity Cr film 5-60 nm thick and a low resistivity Sn film 30-100 nm thick. The structure of the films is described and an equation for the frequency response is discussed. The variation of resistance against log f...
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Veröffentlicht in: | Journal of materials science letters 1985-10, Vol.4 (10), p.1213-1216 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A study was made of the frequency response of the effective resistance of a high resistivity Cr film 5-60 nm thick and a low resistivity Sn film 30-100 nm thick. The structure of the films is described and an equation for the frequency response is discussed. The variation of resistance against log f is plotted for various thicknesses. For lower thickness films the d.c. resistivity falls suddenly but for greater thicknesses the resistivity increases gradually. A mathematical model proposed for the frequency response was valid for the discontinuous films like Cr but could not be used for semi-continuous films like Sn. 25 ref.--H.B.C. |
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ISSN: | 0261-8028 1573-4811 |
DOI: | 10.1007/BF00723461 |