Optical properties of planar waveguides formed by He super(+) implantation in LiNbO sub(3)

The variation in optical properties of He super(+)-implanted LiNbO sub(3) waveguides has been investigated as a function of ion energy and dose for both TE and TM polarizations. Results presented indicate the importance of implant temperature in determining waveguide properties. The effect of aging on optical attenuation is also reported. Although TM (ordinary) mode behavior is determined by the refractive-index profile caused by ion damage, TE-(extraordinary) mode properties are also affected by changes in stoichiometry.