Metalorganic chemical vapor deposition and photoluminescence of nm GaAs doping superlattices
Metalorganic chemical vapor deposition of ultrathin doped GaAs multilayer structures is reported. Low-temperature photoluminescence is used as a powerful characterization method. By observing the shift of the effective band gap with varying layer thickness of doping superlattices we demonstrate that...
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Veröffentlicht in: | Journal of applied physics 1985-08, Vol.58 (4), p.1696-1697 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Metalorganic chemical vapor deposition of ultrathin doped GaAs multilayer structures is reported. Low-temperature photoluminescence is used as a powerful characterization method. By observing the shift of the effective band gap with varying layer thickness of doping superlattices we demonstrate that highly doped layers which are separated by only 4 nm do not diffuse together during growth. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.336039 |