Reproducible technique for fabrication of thin films of high transition temperature superconductors

We report on a new process to make films of Y1Ba2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (106 A/cm2 at 81 K), and a reduced sensitivity to fabrication...

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Veröffentlicht in:	Appl. Phys. Lett.; (United States) 1987-11, Vol.51 (21), p.1753-1755
Hauptverfasser:	MANKIEWICH, P. M, SCOFIELD, J. H, SKOCPOL, W. J, HOWARD, R. E, DAYEM, A. H, GOOD, E
Format:	Artikel
Sprache:	eng
Schlagworte:	360201 - Ceramics, Cermets, & Refractories- Preparation & Fabrication 360204 - Ceramics, Cermets, & Refractories- Physical Properties 656100 - Condensed Matter Physics- Superconductivity ALKALINE EARTH METAL COMPOUNDS ANNEALING BARIUM COMPOUNDS BARIUM FLUORIDES BARIUM OXIDES CHALCOGENIDES COATINGS CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY COPPER COPPER COMPOUNDS COPPER OXIDES CRITICAL CURRENT Cross-disciplinary physics: materials science rheology CURRENT DENSITY CURRENTS DATA DEPOSITION ELECTRIC CONDUCTIVITY ELECTRIC CURRENTS ELECTRICAL PROPERTIES ELECTRONIC CIRCUITS ELEMENTS EVAPORATION Exact sciences and technology EXPERIMENTAL DATA FABRICATION FLUORIDES FLUORINE COMPOUNDS HALIDES HALOGEN COMPOUNDS HEAT TREATMENTS INFORMATION INTEGRATED CIRCUITS Ion and electron beam-assisted deposition ion plating MATERIALS SCIENCE METALS Methods of deposition of films and coatings film growth and epitaxy MICROELECTRONIC CIRCUITS MICROELECTRONICS NUMERICAL DATA OXIDES OXYGEN COMPOUNDS PHASE TRANSFORMATIONS PHYSICAL PROPERTIES Physics SENSITIVITY STRONTIUM COMPOUNDS STRONTIUM OXIDES SUPERCONDUCTING FILMS SUPERCONDUCTIVITY SURFACE COATING THERMODYNAMIC PROPERTIES TITANIUM COMPOUNDS TITANIUM OXIDES TRANSITION ELEMENT COMPOUNDS TRANSITION ELEMENTS TRANSITION TEMPERATURE VACUUM COATING VACUUM EVAPORATION VAPOR DEPOSITED COATINGS YTTRIUM YTTRIUM COMPOUNDS YTTRIUM OXIDES
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Beschreibung
Zusammenfassung:	We report on a new process to make films of Y1Ba2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (106 A/cm2 at 81 K), and a reduced sensitivity to fabrication and environmental conditions. Because of the lower reactivity of the films, we have been able to pattern them in both the pre-annealed and post-annealed states using conventional positive photoresist technology.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.98513