Microscopy of surfaces and applications to molecular beam epitaxy

A scanning transmission electron microscope has been specifically designed for studies of reconstructed surfaces and epitaxial growth processes. Incorporation of a molecular beam epitaxy system, Auger spectrometer and ion gun along with ultra-high vacuum make this instrument ideally suited for this...

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Veröffentlicht in:	Ultramicroscopy 1985, Vol.17 (3), p.185-191
Hauptverfasser:	Petroff, P.M., Chen, C.H., Werder, D.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface structure and topography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Beschreibung
Zusammenfassung:	A scanning transmission electron microscope has been specifically designed for studies of reconstructed surfaces and epitaxial growth processes. Incorporation of a molecular beam epitaxy system, Auger spectrometer and ion gun along with ultra-high vacuum make this instrument ideally suited for this type of investigation. An analysis of the reconstructed GaAs surface is also given to demonstrate the instrument capabilities.
ISSN:	0304-3991 1879-2723
DOI:	10.1016/0304-3991(85)90085-3