On-chip metalenses based on one-dimensional gradient trench in the broadband visible

Metasurfaces are composed of flat, ultrathin subwavelength nanoantennas with strong capability in manipulating light propagation by modulations on its phase, amplitude, and polarization. For instance, the invention of two-dimensional (2D) metalenses has enabled light focusing and imaging in three-dimensional (3D) free space with miniaturized thickness and device size at a planar surface. However, such inherent form of 2D arrays and focusing functionality at 3D optical free-space limits the degree of freedom for light propagation and manipulation along a 2D planar surface and eventually the possibility of on-chip photonic system integration. Here, we theoretically study and demonstrate a new type of planar on-chip metalens, which enables light focusing and strong localization at a 2D surface. The planar on-chip architecture design is based on the one-dimensional (1D) length or width gradient trench metalens (GTM), which could yield the elaborately engineered phase shift for propagating light within the on-chip waveguide at the visible wavelength of 500 nm. By generating 1D phase arrangement at the nanoscale, a miniature on-chip metalens with ∼ 3 × 0.5 µ m dimension could achieve light focusing on a 2D waveguide surface with the flexibility to design scalable focal lengths and ultra-high numerical aperture of up to ∼ 0.99 . Additionally, GTM metalens designs could also exhibit overlapped high depth-of-focus, which consequently could behave as achromatic-like lensing at the selected focal plane. Furthermore, we manifest that the focusing functionality can also be subject to dynamically tuning and switching on-and-off with TE/TM polarization change or waveguide index alteration. We believe this new form of on-chip 1D metalens holds potential applications including on-chip light manipulation functionality of focusing and diverging, optical on-chip sensing, next-generation on-chip optical communication, signal processing as well as imaging devices, etc.