Programing of Crystal Diameter in Czochralski Growth by a Cooling Plot: Application to InSb

It is shown that, under thermal "stiffness" conditions, the dimensions of a crystal grown by the Czochralski method may be programed by a cooling plot. The cooling plot is calculated from the measured longitudinal and radial thermal gradients, involving also the melt-to-solid densities rat...

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Veröffentlicht in:Materials research bulletin 1984-01, Vol.19 (1), p.49-57
Hauptverfasser: Burshtein, Z, Azulay, M
Format: Artikel
Sprache:eng
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Zusammenfassung:It is shown that, under thermal "stiffness" conditions, the dimensions of a crystal grown by the Czochralski method may be programed by a cooling plot. The cooling plot is calculated from the measured longitudinal and radial thermal gradients, involving also the melt-to-solid densities ratio. Utilization of the principle could save the need for sophisticated expensive automatic dia. control systems. The principle was successfully applied to the growing of InSb single crystals of dia. approx 2 cm. 18 ref.--AA
ISSN:0025-5408