High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection
We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as...
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Veröffentlicht in: | Optics letters 2020-08, Vol.45 (16), p.4460-4463 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as a Shack–Hartmann wavefront sensor. We use it to detect wavefronts of both oblique incident plane beams and vortex beams. The experimental results match well with theoretical ones. |
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ISSN: | 0146-9592 1539-4794 |
DOI: | 10.1364/OL.398616 |