High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection

We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as...

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Veröffentlicht in:Optics letters 2020-08, Vol.45 (16), p.4460-4463
Hauptverfasser: Huang, Yi, Qin, Yanliang, Tu, Pu, Zhang, Qi, Zhao, Ming, Yang, ZhenYu
Format: Artikel
Sprache:eng
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Zusammenfassung:We fabricate 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. The array consists of periodical hexagonal plano-convex microlens units with a diameter of 9 µm. The focusing efficiency of each microlens is measured to be 92%. Combined with a CCD camera, the MLA works as a Shack–Hartmann wavefront sensor. We use it to detect wavefronts of both oblique incident plane beams and vortex beams. The experimental results match well with theoretical ones.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.398616