Single-shot multispectral angle-resolved ellipsometry

We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera. A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain. Modified paramet...

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Veröffentlicht in:Applied optics (2004) 2020-07, Vol.59 (21), p.6296-6303
Hauptverfasser: Choi, Garam, Woo Lee, Seung, Yong Lee, Sin, Jae Pahk, Heui
Format: Artikel
Sprache:eng
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Zusammenfassung:We describe an instantaneous measurement scheme of multispectral angle-resolved ellipsometry with a color camera. A back focal plane image captured by the color camera enables us to simultaneously measure various polarization states along incidence angles and a multispectral domain. Modified parameters based on the principle of micro-ellipsometry are derived for an adequate form in a red, green and blue (RGB) domain by considering the wideband multispectral acquisition. The proposed method is validated by the measurement of uniformly deposited films and comparing our results with a commercial ellipsometer. The comparison shows that our proposed method enables real-time inspection with high precision.
ISSN:1559-128X
2155-3165
1539-4522
DOI:10.1364/AO.396907