Structural and phase transformations in electron-beam-treated titanium films

Structural and phase transformations in polycrystalline and epitaxial titanium films exposed to an electron beam of power density 11 W cm −2 were studied. Polycrystalline titanium films treated with an electron beam at 6 J cm −2 are shown to undergo recrystallization processes which result in an increase in grain sizes, while at an energy density of 24 J cm −2 oxidation processes take place leading to the formation and growth of pores. The electron-beam-treated epitaxial titanium films form an ordered solid solution of oxygen in titanium, of stoichiometry Ti 3O.