Gas adsorption on thin films of chromium studied by internal stress measurements
The effect of O 2, H 2O, CO, H 2, N 2 and CH 4 adsorption on the internal stress of evaporated chromium films was investigated under high vacuum conditions. While the stress in chromium films is not altered during exposure to H 2, CH 4 and N 2 distinct stress changes are found when chromium films ar...
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Veröffentlicht in: | Thin solid films 1984-01, Vol.111 (4), p.303-311 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
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Zusammenfassung: | The effect of O
2, H
2O, CO, H
2, N
2 and CH
4 adsorption on the internal stress of evaporated chromium films was investigated under high vacuum conditions. While the stress in chromium films is not altered during exposure to H
2, CH
4 and N
2 distinct stress changes are found when chromium films are exposed to H
2O, CO and O
2. The adsorption of H
2O and CO on the metal film gives rise to a compressive stress, because the surface tension of the metal film is lowered owing to saturation of free surface valences at the film and the grain boundary surfaces. A different behaviour is observed for the O
2Cr interaction. On exposure of the film to O
2 a slight compressive stress is observed, which on further exposure changes to a tensile stress. While the compressive stress is again believed to be due to the formation of an adsorption layer, the subsequent tensile stress is interpreted as indicating the formation of a protective layer of bulk chromium oxide. The thickness of this protective layer depends on the O
2 exposure pressure. The chromium oxide layer is impermeable to O
2 and CO, but not to H
2O. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(84)90322-5 |