The effects of annealing on the structure and composition of electron-beam-evaporated tin oxide films

Electron-beam-evaporated films of tin oxide are amorphous with compositions between SnO and SnO 2. Devitrification of the film in an isochronal anneal (24h) begins to occur at about 350°C with the formation of crystalline SnO. At a higher annealing temperature (about 600°C) the amorphous film transf...

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Veröffentlicht in:Thin solid films 1984-01, Vol.122 (3), p.231-241
Hauptverfasser: Choudhury, N.S., Goehner, R.P., Lewis, N., Green, R.W.
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container_end_page 241
container_issue 3
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container_title Thin solid films
container_volume 122
creator Choudhury, N.S.
Goehner, R.P.
Lewis, N.
Green, R.W.
description Electron-beam-evaporated films of tin oxide are amorphous with compositions between SnO and SnO 2. Devitrification of the film in an isochronal anneal (24h) begins to occur at about 350°C with the formation of crystalline SnO. At a higher annealing temperature (about 600°C) the amorphous film transforms to SnO 2 and metallic tin.
doi_str_mv 10.1016/0040-6090(84)90050-6
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source ScienceDirect Journals (5 years ago - present)
subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
title The effects of annealing on the structure and composition of electron-beam-evaporated tin oxide films
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