The effects of annealing on the structure and composition of electron-beam-evaporated tin oxide films

Electron-beam-evaporated films of tin oxide are amorphous with compositions between SnO and SnO 2. Devitrification of the film in an isochronal anneal (24h) begins to occur at about 350°C with the formation of crystalline SnO. At a higher annealing temperature (about 600°C) the amorphous film transf...

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Veröffentlicht in:	Thin solid films 1984-01, Vol.122 (3), p.231-241
Hauptverfasser:	Choudhury, N.S., Goehner, R.P., Lewis, N., Green, R.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Electron-beam-evaporated films of tin oxide are amorphous with compositions between SnO and SnO 2. Devitrification of the film in an isochronal anneal (24h) begins to occur at about 350°C with the formation of crystalline SnO. At a higher annealing temperature (about 600°C) the amorphous film transforms to SnO 2 and metallic tin.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/0040-6090(84)90050-6