Effect of surface semichanneling on energy distributions of molecular ions reflected from single-crystal surface

Regularities in the energy distributions of molecular nitrogen ions reflected from (100)Cu crystal face are studied. The half-widths (FWHM) of the energy distributions of the reflected ions have been found to vary strongly near aligned orientations of the target with respect to the bombarding ion beam. A relationship has been found between the survival fraction of reflected molecular ions and the effect of ion focusing in surface semichanneling.