Effect of implantation dose on the hardness, friction, and wear of Sb-implanted Al

The hardness, friction, and wear behavior of Sb+-implanted commercially pure Al was investigated. The specimens were implanted at 200 KeV to doses of between 1013 and 1017 ions/cm2. Hardness was observed to increase linearly with dose. The increase in wear resistance was not dose dependent and the h...

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Veröffentlicht in:Journal of applied physics 1984-05, Vol.55 (9), p.3308-3314
1. Verfasser: MADAKSON, P. B
Format: Artikel
Sprache:eng
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Zusammenfassung:The hardness, friction, and wear behavior of Sb+-implanted commercially pure Al was investigated. The specimens were implanted at 200 KeV to doses of between 1013 and 1017 ions/cm2. Hardness was observed to increase linearly with dose. The increase in wear resistance was not dose dependent and the high doses were found to increase friction. Rutherford backscattering analysis revealed a significant damage of the Al lattice at high doses. It also showed that Fe and Cu, which are impurities in Al, diffused to and away from the implanted surface, respectively. Scanning electron microscopy indicated the formation of Sb and Fe precipitates. The mobility of implanted ions and impurity atoms is considered to be associated with the point defects created during the implantation of Sb+. The changes in the mechanical properties investigated probably resulted from the pinning effect that these defects and precipitates, and their associated stress fields, exert on dislocations.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.333367