Catalyst-Free Growth of Two-Dimensional BCxN Materials on Dielectrics by Temperature-Dependent Plasma-Enhanced Chemical Vapor Deposition

Catalyst-Free Growth of Two-Dimensional BCxN Materials on Dielectrics by Temperature-Dependent Plasma-Enhanced Chemical Vapor Deposition

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Veröffentlicht in:ACS applied materials & interfaces 2020-07, Vol.12 (29), p.33113-33120
Hauptverfasser: Yi, Kongyang, Jin, Zhepeng, Bu, Saiyu, Wang, Dingguan, Liu, Donghua, Huang, Yamin, Dong, Yemin, Yuan, Qinghong, Liu, Yunqi, Wee, Andrew Thye Shen, Wei, Dacheng
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container_end_page 33120
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container_title ACS applied materials & interfaces
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creator Yi, Kongyang
Jin, Zhepeng
Bu, Saiyu
Wang, Dingguan
Liu, Donghua
Huang, Yamin
Dong, Yemin
Yuan, Qinghong
Liu, Yunqi
Wee, Andrew Thye Shen
Wei, Dacheng
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doi_str_mv 10.1021/acsami.0c08555
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title Catalyst-Free Growth of Two-Dimensional BCxN Materials on Dielectrics by Temperature-Dependent Plasma-Enhanced Chemical Vapor Deposition
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