Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators
In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibratio...
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Veröffentlicht in: | Optics express 2020-04, Vol.28 (8), p.12294-12301 |
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creator | Cazier, Nicolas Sadeghi, Pedram Chien, Miao-Hsuan Shawrav, Mostafa Moonir Schmid, Silvan |
description | In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth. |
doi_str_mv | 10.1364/OE.388324 |
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fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_2403040867</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2403040867</sourcerecordid><originalsourceid>FETCH-LOGICAL-c320t-657b48c02417791b7e8a8c312bfd438bb3c3a8738b8d4bdccf4fcacc3234cce43</originalsourceid><addsrcrecordid>eNpNkE1LAzEQhoMotlYP_gHZox62JpvYpEcp9QMKPagXLyGZzdpINlmTLNJ_75ZW8TQvwzMvzIPQJcFTQmfsdr2cUiFoxY7QmOA5KxkW_PhfHqGzlD4xJozP-SkaDSimvOJj9P7SGchRObctdAyq1srXhXG7ZShDly0Ubah7p7INvvi2eVN45cOBaA1slLegXJFytP6jiCYFr3KI6RydNMolc3GYE_T2sHxdPJWr9ePz4n5VAq1wLmd3XDMBuGKE8znR3AglgJJKNzWjQmsKVAk-JFEzXQM0rAEFwzFlAIbRCbre93YxfPUmZdnaBMY55U3ok9z9igcLMz6gN3sUYkgpmkZ20bYqbiXBcqdSrpdyr3Jgrw61vW5N_Uf-uqM_ehNwrQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2403040867</pqid></control><display><type>article</type><title>Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators</title><source>DOAJ Directory of Open Access Journals</source><source>EZB-FREE-00999 freely available EZB journals</source><source>Alma/SFX Local Collection</source><creator>Cazier, Nicolas ; Sadeghi, Pedram ; Chien, Miao-Hsuan ; Shawrav, Mostafa Moonir ; Schmid, Silvan</creator><creatorcontrib>Cazier, Nicolas ; Sadeghi, Pedram ; Chien, Miao-Hsuan ; Shawrav, Mostafa Moonir ; Schmid, Silvan</creatorcontrib><description>In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.</description><identifier>ISSN: 1094-4087</identifier><identifier>EISSN: 1094-4087</identifier><identifier>DOI: 10.1364/OE.388324</identifier><identifier>PMID: 32403727</identifier><language>eng</language><publisher>United States</publisher><ispartof>Optics express, 2020-04, Vol.28 (8), p.12294-12301</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c320t-657b48c02417791b7e8a8c312bfd438bb3c3a8738b8d4bdccf4fcacc3234cce43</citedby><cites>FETCH-LOGICAL-c320t-657b48c02417791b7e8a8c312bfd438bb3c3a8738b8d4bdccf4fcacc3234cce43</cites><orcidid>0000-0003-3778-7137</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27903,27904</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/32403727$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Cazier, Nicolas</creatorcontrib><creatorcontrib>Sadeghi, Pedram</creatorcontrib><creatorcontrib>Chien, Miao-Hsuan</creatorcontrib><creatorcontrib>Shawrav, Mostafa Moonir</creatorcontrib><creatorcontrib>Schmid, Silvan</creatorcontrib><title>Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators</title><title>Optics express</title><addtitle>Opt Express</addtitle><description>In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.</description><issn>1094-4087</issn><issn>1094-4087</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNpNkE1LAzEQhoMotlYP_gHZox62JpvYpEcp9QMKPagXLyGZzdpINlmTLNJ_75ZW8TQvwzMvzIPQJcFTQmfsdr2cUiFoxY7QmOA5KxkW_PhfHqGzlD4xJozP-SkaDSimvOJj9P7SGchRObctdAyq1srXhXG7ZShDly0Ubah7p7INvvi2eVN45cOBaA1slLegXJFytP6jiCYFr3KI6RydNMolc3GYE_T2sHxdPJWr9ePz4n5VAq1wLmd3XDMBuGKE8znR3AglgJJKNzWjQmsKVAk-JFEzXQM0rAEFwzFlAIbRCbre93YxfPUmZdnaBMY55U3ok9z9igcLMz6gN3sUYkgpmkZ20bYqbiXBcqdSrpdyr3Jgrw61vW5N_Uf-uqM_ehNwrQ</recordid><startdate>20200413</startdate><enddate>20200413</enddate><creator>Cazier, Nicolas</creator><creator>Sadeghi, Pedram</creator><creator>Chien, Miao-Hsuan</creator><creator>Shawrav, Mostafa Moonir</creator><creator>Schmid, Silvan</creator><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0003-3778-7137</orcidid></search><sort><creationdate>20200413</creationdate><title>Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators</title><author>Cazier, Nicolas ; Sadeghi, Pedram ; Chien, Miao-Hsuan ; Shawrav, Mostafa Moonir ; Schmid, Silvan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c320t-657b48c02417791b7e8a8c312bfd438bb3c3a8738b8d4bdccf4fcacc3234cce43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Cazier, Nicolas</creatorcontrib><creatorcontrib>Sadeghi, Pedram</creatorcontrib><creatorcontrib>Chien, Miao-Hsuan</creatorcontrib><creatorcontrib>Shawrav, Mostafa Moonir</creatorcontrib><creatorcontrib>Schmid, Silvan</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><jtitle>Optics express</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Cazier, Nicolas</au><au>Sadeghi, Pedram</au><au>Chien, Miao-Hsuan</au><au>Shawrav, Mostafa Moonir</au><au>Schmid, Silvan</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators</atitle><jtitle>Optics express</jtitle><addtitle>Opt Express</addtitle><date>2020-04-13</date><risdate>2020</risdate><volume>28</volume><issue>8</issue><spage>12294</spage><epage>12301</epage><pages>12294-12301</pages><issn>1094-4087</issn><eissn>1094-4087</eissn><abstract>In this paper, we present a shutter-based electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate the width of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.</abstract><cop>United States</cop><pmid>32403727</pmid><doi>10.1364/OE.388324</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0003-3778-7137</orcidid><oa>free_for_read</oa></addata></record> |
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title | Spectrally broadband electro-optic modulation with nanoelectromechanical string resonators |
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