Cross-sectioning of layered thin films by ultramicrotomy
Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter.
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Veröffentlicht in: | Ultramicroscopy 1986, Vol.19 (1), p.69-73 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter. |
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ISSN: | 0304-3991 1879-2723 |
DOI: | 10.1016/0304-3991(86)90008-2 |