Cross-sectioning of layered thin films by ultramicrotomy

Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter.

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Veröffentlicht in:Ultramicroscopy 1986, Vol.19 (1), p.69-73
Hauptverfasser: Marshall, A.F., Dobbertin, D.C.
Format: Artikel
Sprache:eng
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Zusammenfassung:Ultramicrotomy is shown to be a valuable technique for observing thin films in cross-section. The structure of layered Co-Tb and Mo-Ge films are characterized, with layers as thin as 0.9 nm resolved in the latter.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(86)90008-2