Massively Multiplexed Submicron Particle Patterning in Acoustically Driven Oscillating Nanocavities

Nanoacoustic fields are a promising method for particle actuation at the nanoscale, though THz frequencies are typically required to create nanoscale wavelengths. In this work, the generation of robust nanoscale force gradients is demonstrated using MHz driving frequencies via acoustic‐structure interactions. A structured elastic layer at the interface between a microfluidic channel and a traveling surface acoustic wave (SAW) device results in submicron acoustic traps, each of which can trap individual submicron particles. The acoustically driven deformation of nanocavities gives rise to time‐averaged acoustic fields which direct suspended particles toward, and trap them within, the nanocavities. The use of SAWs permits massively multiplexed particle manipulation with deterministic patterning at the single‐particle level. In this work, 300 nm diameter particles are acoustically trapped in 500 nm diameter cavities using traveling SAWs with wavelengths in the range of 20–80 µm with one particle per cavity. On‐demand generation of nanoscale acoustic force gradients has wide applications in nanoparticle manipulation, including bioparticle enrichment and enhanced catalytic reactions for industrial applications. The interaction between a MHz traveling surface acoustic wave (SAW) and an elastic nanocavity layer at the interface of a microfluidic channel generates acoustically driven oscillations in the nanocavities. The resultant nanoscale acoustic pressure gradients along the height of these nanocavities permit massively multiplexed submicron particle trapping within the nanocavities at the single‐particle level.