Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment
SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Pos...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on electron devices 1980-01, Vol.ED-27 (9), p.1841-1843 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1843 |
|---|---|
| container_issue | 9 |
| container_start_page | 1841 |
| container_title | IEEE transactions on electron devices |
| container_volume | ED-27 |
| creator | Dobkin, D M Kane, R J |
| description | SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed. |
| format | Article |
| fullrecord | <record><control><sourceid>proquest</sourceid><recordid>TN_cdi_proquest_miscellaneous_23803071</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>23803071</sourcerecordid><originalsourceid>FETCH-proquest_miscellaneous_238030713</originalsourceid><addsrcrecordid>eNqNi7sOgjAUQDtoIj7-4U5GB5JCieIqYtg0QVxJgWusKa1y2_-XwQ9wOjnJORMWcB6l4UGkYsbmRK9Rd0kSB6yojCcvNVyfaGyPRoIykN1PUKoLkG828RYq0-EApScnlcEOco2tG6yBo-0bOXTj5pZs-pCacPXjgq3P-S0rwvdgPx7J1b2iFrWWBq2nOhYpF3wfib_DL6jlPUE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>23803071</pqid></control><display><type>article</type><title>Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment</title><source>IEEE Electronic Library (IEL)</source><creator>Dobkin, D M ; Kane, R J</creator><creatorcontrib>Dobkin, D M ; Kane, R J</creatorcontrib><description>SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.</description><identifier>ISSN: 0018-9383</identifier><language>eng</language><ispartof>IEEE transactions on electron devices, 1980-01, Vol.ED-27 (9), p.1841-1843</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784</link.rule.ids></links><search><creatorcontrib>Dobkin, D M</creatorcontrib><creatorcontrib>Kane, R J</creatorcontrib><title>Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment</title><title>IEEE transactions on electron devices</title><description>SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.</description><issn>0018-9383</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1980</creationdate><recordtype>article</recordtype><recordid>eNqNi7sOgjAUQDtoIj7-4U5GB5JCieIqYtg0QVxJgWusKa1y2_-XwQ9wOjnJORMWcB6l4UGkYsbmRK9Rd0kSB6yojCcvNVyfaGyPRoIykN1PUKoLkG828RYq0-EApScnlcEOco2tG6yBo-0bOXTj5pZs-pCacPXjgq3P-S0rwvdgPx7J1b2iFrWWBq2nOhYpF3wfib_DL6jlPUE</recordid><startdate>19800101</startdate><enddate>19800101</enddate><creator>Dobkin, D M</creator><creator>Kane, R J</creator><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>19800101</creationdate><title>Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment</title><author>Dobkin, D M ; Kane, R J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-proquest_miscellaneous_238030713</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1980</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dobkin, D M</creatorcontrib><creatorcontrib>Kane, R J</creatorcontrib><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dobkin, D M</au><au>Kane, R J</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment</atitle><jtitle>IEEE transactions on electron devices</jtitle><date>1980-01-01</date><risdate>1980</risdate><volume>ED-27</volume><issue>9</issue><spage>1841</spage><epage>1843</epage><pages>1841-1843</pages><issn>0018-9383</issn><abstract>SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.</abstract></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0018-9383 |
| ispartof | IEEE transactions on electron devices, 1980-01, Vol.ED-27 (9), p.1841-1843 |
| issn | 0018-9383 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_23803071 |
| source | IEEE Electronic Library (IEL) |
| title | Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-24T03%3A32%3A11IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Unusual%20Phenomena%20in%20CVD%20SiO%20sub(2)%20Under%20Sustained%20Electron%20Bombardment&rft.jtitle=IEEE%20transactions%20on%20electron%20devices&rft.au=Dobkin,%20D%20M&rft.date=1980-01-01&rft.volume=ED-27&rft.issue=9&rft.spage=1841&rft.epage=1843&rft.pages=1841-1843&rft.issn=0018-9383&rft_id=info:doi/&rft_dat=%3Cproquest%3E23803071%3C/proquest%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=23803071&rft_id=info:pmid/&rfr_iscdi=true |