Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment

Unusual Phenomena in CVD SiO sub(2) Under Sustained Electron Bombardment

SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Pos...

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Veröffentlicht in:IEEE transactions on electron devices 1980-01, Vol.ED-27 (9), p.1841-1843
Hauptverfasser: Dobkin, D M, Kane, R J
Format: Artikel
Sprache:eng
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Zusammenfassung:SEM observations of passivating ozide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm super(2) electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.
ISSN:0018-9383