Multiple-pass zone melting of InSb thin films
A preliminary investigation of the behaviour of InSb films subjected to multiple-pass hot-wire zone melting is reported. The effects of the zone displacement rate, the zone width, the number of zone passes and the substrate material on the final properties of the films were studied. The structural p...
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| Veröffentlicht in: | Thin solid films 1981-11, Vol.85 (3), p.319-322 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A preliminary investigation of the behaviour of InSb films subjected to multiple-pass hot-wire zone melting is reported. The effects of the zone displacement rate, the zone width, the number of zone passes and the substrate material on the final properties of the films were studied. The structural properties of and the impurity distributions in the films depend mainly on the substrate material and the number of zone passes. |
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| ISSN: | 0040-6090 1879-2731 |
| DOI: | 10.1016/0040-6090(81)90142-5 |