Capacitance transient spectra of processing- and radiation-induced defects in silicon solar cells
Capacitance transient spectroscopy is used to study defects in chips of fully fabricated Si solar cells. Characteristic differences are observed as a function of the crystal growth type (crucible grown or float zoned) and dopant (boron or Al) of the starting material, processing variables (diffused...
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Veröffentlicht in: | Journal of electronic materials 1980-03, Vol.9 (2), p.419-434 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Capacitance transient spectroscopy is used to study defects in chips of fully fabricated Si solar cells. Characteristic differences are observed as a function of the crystal growth type (crucible grown or float zoned) and dopant (boron or Al) of the starting material, processing variables (diffused or implanted junctions, electron beam or furnace annealing) and radiation environment (1 MeV electron irradiation).13 refs.--AA |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/BF02670858 |