Preparation and characterization of an optically-detectable hydrogen gas sensor consisting of Pd/WO sub(3) thin films

An optically-detectable H sub(2) sensor of Pd/WO sub(3) was prepared by r.f. magnetron sputtering technique, and the sensing characteristics were investigated in terms of the effect of variety of sputtering conditions, including the difference in the target material used. The sensor prepared by using W metal plate as the target showed higher sensitivity and faster response rate than that prepared by using WO sub(3) powder as the target.