The effects of hydrogen on the nitridation of silicon
It is believed that H sub 2 assists the removal of a reaction-inhibiting oxide film on the Si surface. The effect of H sub 2 on the Beta-phase forming process tends to be more marked than that on Alpha-phase reaction.
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| Veröffentlicht in: | Journal of materials science 1979-04, Vol.14 (4), p.1007-1008 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | It is believed that H sub 2 assists the removal of a reaction-inhibiting oxide film on the Si surface. The effect of H sub 2 on the Beta-phase forming process tends to be more marked than that on Alpha-phase reaction. |
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| ISSN: | 0022-2461 1573-4803 |
| DOI: | 10.1007/BF00550738 |