Amorphous silicon p - i - n solar cells fabricated by reactive sputtering

We report, for the first time, the fabrication of indium-tin-oxide p-i-n amorphous silicon solar cells by the method of reactive sputtering. These solar cells exhibit power conversion efficiency of 4.0% under AM1 illumination. The junction characteristics of these solar cells are discussed.

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Veröffentlicht in:Appl. Phys. Lett.; (United States) 1982-03, Vol.40 (6), p.515-517
Hauptverfasser: Moustakas, T. D., Friedman, R.
Format: Artikel
Sprache:eng
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Zusammenfassung:We report, for the first time, the fabrication of indium-tin-oxide p-i-n amorphous silicon solar cells by the method of reactive sputtering. These solar cells exhibit power conversion efficiency of 4.0% under AM1 illumination. The junction characteristics of these solar cells are discussed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.93162