Broadband infrared thermal detection using manganese cobalt nickel oxide thin film

Room temperature, broadband infrared (IR) bolometer was investigated for the first time by using Mn Co Ni O (MCNO) thin film with dielectric-metal-dielectric absorptive layers. The Si N /NiCr/SiO layer was constructed to improve light absorption. A responsivity of 98.6 V/W and D* of 2.1 × 10 cm∙Hz /W@20 Hz, with a typical time constant of 14.5 ms, was obtained with a 1550 nm laser. The response spectra of the detector covered the range from near to far infrared, which greatly enhanced the potential of MCNO films in large-scale IR thermal detection applications. This study provides an efficient way to develop large scale, broadband MCNO IR detectors.