Assessment of different models for quantitative Auger analysis in applied surface studies

Assessment of different models for quantitative Auger analysis in applied surface studies

The use of Auger Electron Spectroscopy (AES) for quantitative analysis is described on the basis of three binary systems Cu-Al, Cr-Al and Ag-Cu, and one multicomponent system, AISI 304 stainless steel. The effects of sputtering and AES matrix corrections are discussed in view of the results.

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Veröffentlicht in:Applications of surface science 1983-01, Vol.15 (1), p.270-280
1. Verfasser: Minni, E.
Format: Artikel
Sprache:eng
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Zusammenfassung:The use of Auger Electron Spectroscopy (AES) for quantitative analysis is described on the basis of three binary systems Cu-Al, Cr-Al and Ag-Cu, and one multicomponent system, AISI 304 stainless steel. The effects of sputtering and AES matrix corrections are discussed in view of the results.
ISSN:0378-5963
DOI:10.1016/0378-5963(83)90022-3