SEM-EBIC and traveling light spot diffusion length measurements: Normally irradiated charge-collecting diode

An analysis of the induced current in a normally irradiated diode by monochromatic light or a SEM electron beam is given, which can be used to determine the diffusion length. Two light sources are considered: a traveling light spot and uniform illumination with part of the sample containing the diod...

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Veröffentlicht in:IEEE transactions on electron devices 1983-06, Vol.30 (6), p.577-580
Hauptverfasser: Ioannou, D.E., Gledhill, R.J.
Format: Artikel
Sprache:eng
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Zusammenfassung:An analysis of the induced current in a normally irradiated diode by monochromatic light or a SEM electron beam is given, which can be used to determine the diffusion length. Two light sources are considered: a traveling light spot and uniform illumination with part of the sample containing the diode shadowed by a knife-edge mask. The diffusion length is determined by readily computed numerical calculations.
ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1983.21171