Optical waveguides in LiTaO3 formed by proton exchange

The fabrication of optical waveguides in LiTaO3 using proton exchange in hot benzoic acid is described. All specimens analyzed were X-cut. An increase in surface extraordinary index of about 0.14 has been observed for samples exchanged for 3 h at a melt temperature of 249 C. No change was observed in the ordinary index. Waveguide fabrication was facilitated by further baking the samples for an extended period of time at a temperature hotter than the acid melt. The latter technique also served to minimize the surface damage that is characteristic of acid baths exceeding roughly 4 h. The depth of proton exchange in X-cut LiTaO3 appears to be considerably less than would be the case for X-cut LiNbO3 under the same conditions.