The atomic force microscope used as a powerful tool for machining surfaces

Different methods of creating and imaging small structures with an atomic force microscope (AFM) are reported. We show indentations, lines and more complex patterns created with three different techniques. On polymer surfaces we are able to reproducibly create structures with typical sizes down to 5...

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Veröffentlicht in:Ultramicroscopy 1992-07, Vol.42 (B), p.1446-1451
Hauptverfasser: Jung, T.A., Moser, A., Hug, H.J., Brodbeck, D., Hofer, R., Hidber, H.R., Schwarz, U.D.
Format: Artikel
Sprache:eng
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Zusammenfassung:Different methods of creating and imaging small structures with an atomic force microscope (AFM) are reported. We show indentations, lines and more complex patterns created with three different techniques. On polymer surfaces we are able to reproducibly create structures with typical sizes down to 50 nm. This work constitutes an example of using the AFM for controlled machining of the surface. We discuss applications of the described method in basic and technological research.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(92)90464-U