Cone formation on argon-bombarded copper
Conical protrusions observed in the scanning electron microscope on surfaces of copper which have been eroded by 20.5-keV Ar+ ion bombardment are studied for various doses of ions. The critical dose and the cone apex angle are determined, and the results discussed in the light of the existing theori...
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Veröffentlicht in: | J. Appl. Phys.; (United States) 1983-02, Vol.54 (2), p.1169-1171 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Conical protrusions observed in the scanning electron microscope on surfaces of copper which have been eroded by 20.5-keV Ar+ ion bombardment are studied for various doses of ions. The critical dose and the cone apex angle are determined, and the results discussed in the light of the existing theories show the importance of secondary and tertiary effects in the evolution of the structure of cones. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.332094 |