Comparison of r.f. sputtered zinc oxide thin films on nonpiezoelectric substrates
Zinc oxide (ZnO) thin films have been widely used as piezoelectric transducers for generation and detection of bulk and surface acoustic waves. The objective of the present investigation was to study the growth and structure of r.f. sputtered ZnO thin films on various nonpiezoelectric substrates und...
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| Veröffentlicht in: | Journal of materials science letters 1983-12, Vol.2 (12), p.789-795 |
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| container_end_page | 795 |
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| container_issue | 12 |
| container_start_page | 789 |
| container_title | Journal of materials science letters |
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| creator | KHAN, A. S ASHOK AMBARDAR |
| description | Zinc oxide (ZnO) thin films have been widely used as piezoelectric transducers for generation and detection of bulk and surface acoustic waves. The objective of the present investigation was to study the growth and structure of r.f. sputtered ZnO thin films on various nonpiezoelectric substrates under identical sputtering conditions. |
| doi_str_mv | 10.1007/BF00720561 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0261-8028 |
| ispartof | Journal of materials science letters, 1983-12, Vol.2 (12), p.789-795 |
| issn | 0261-8028 1573-4811 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_23124546 |
| source | SpringerNature Journals |
| subjects | Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
| title | Comparison of r.f. sputtered zinc oxide thin films on nonpiezoelectric substrates |
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