Comparison of r.f. sputtered zinc oxide thin films on nonpiezoelectric substrates

Zinc oxide (ZnO) thin films have been widely used as piezoelectric transducers for generation and detection of bulk and surface acoustic waves. The objective of the present investigation was to study the growth and structure of r.f. sputtered ZnO thin films on various nonpiezoelectric substrates und...

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Veröffentlicht in:	Journal of materials science letters 1983-12, Vol.2 (12), p.789-795
Hauptverfasser:	KHAN, A. S, ASHOK AMBARDAR
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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Beschreibung
Zusammenfassung:	Zinc oxide (ZnO) thin films have been widely used as piezoelectric transducers for generation and detection of bulk and surface acoustic waves. The objective of the present investigation was to study the growth and structure of r.f. sputtered ZnO thin films on various nonpiezoelectric substrates under identical sputtering conditions.
ISSN:	0261-8028 1573-4811
DOI:	10.1007/BF00720561