Growth of Alpha- and Beta-Si sub 3 N sub 4 accompanying the nitriding of silicon powder compacts

Growth of Alpha- and Beta-Si sub 3 N sub 4 accompanying the nitriding of silicon powder compacts

Vapor phase reactions between Si- and N-bearing species lead to formation of Alpha-Si sub 3 N sub 4; reactions between solid Si and N sub 2 lead to Beta-Si sub 3 N sub 4.

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Veröffentlicht in:Journal of materials science 1978-01, Vol.13 (10), p.2279-2280
Hauptverfasser: Longland, P, Moulson, A J
Format: Artikel
Sprache:eng
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Zusammenfassung:Vapor phase reactions between Si- and N-bearing species lead to formation of Alpha-Si sub 3 N sub 4; reactions between solid Si and N sub 2 lead to Beta-Si sub 3 N sub 4.
ISSN:0022-2461