Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry
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| Veröffentlicht in: | Journal of research of the National Bureau of Standards. Section A. Physics and chemistry 1963-07, Vol.67A (4), p.363-377 |
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| Format: | Artikel |
| Sprache: | eng |
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| container_end_page | 377 |
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| container_issue | 4 |
| container_start_page | 363 |
| container_title | Journal of research of the National Bureau of Standards. Section A. Physics and chemistry |
| container_volume | 67A |
| creator | McCrackin, Frank L. Passaglia, Elio Stromberg, Robert R. Steinberg, Harold L. |
| description | |
| doi_str_mv | 10.6028/jres.067A.040 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0022-4332 |
| ispartof | Journal of research of the National Bureau of Standards. Section A. Physics and chemistry, 1963-07, Vol.67A (4), p.363-377 |
| issn | 0022-4332 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_2300596249 |
| source | PubMed Central; Alma/SFX Local Collection |
| title | Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry |
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