Analyses of sputtered films of Nb3Ge
The analyses of Nb-Ge films prepared by sputtering with a modified rf arrangement are reported. The results indicate the importance of thermalization of sputtered particles for the formation of the high-transition-temperature compound Nb3Ge.
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| Veröffentlicht in: | Applied physics letters 1977-05, Vol.30 (10), p.543-545 |
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| Sprache: | eng |
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| container_end_page | 545 |
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| container_issue | 10 |
| container_start_page | 543 |
| container_title | Applied physics letters |
| container_volume | 30 |
| creator | Wu, C. T. Kammerdiner, Lee Luo, H. L. |
| description | The analyses of Nb-Ge films prepared by sputtering with a modified rf arrangement are reported. The results indicate the importance of thermalization of sputtered particles for the formation of the high-transition-temperature compound Nb3Ge. |
| doi_str_mv | 10.1063/1.89228 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 1977-05, Vol.30 (10), p.543-545 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_22866898 |
| source | AIP Digital Archive |
| title | Analyses of sputtered films of Nb3Ge |
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