Analyses of sputtered films of Nb3Ge

Analyses of sputtered films of Nb3Ge

The analyses of Nb-Ge films prepared by sputtering with a modified rf arrangement are reported. The results indicate the importance of thermalization of sputtered particles for the formation of the high-transition-temperature compound Nb3Ge.

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Veröffentlicht in:Applied physics letters 1977-05, Vol.30 (10), p.543-545
Hauptverfasser: Wu, C. T., Kammerdiner, Lee, Luo, H. L.
Format: Artikel
Sprache:eng
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Zusammenfassung:The analyses of Nb-Ge films prepared by sputtering with a modified rf arrangement are reported. The results indicate the importance of thermalization of sputtered particles for the formation of the high-transition-temperature compound Nb3Ge.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.89228