Silicon-rich silicon oxide films boost UV sensitivity

Berman-Mendoza et al discuss how silicon-rich silicon oxide (SRO) films boost UV sensitivity. They develop a UV silicon detector made of Si and SRO that shows high efficiency and is completely compatible with silicon fabrication technology. When irradiated with UV light, the SRO film in the detector...

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Veröffentlicht in:	Laser focus world 2005-09, Vol.41 (9), p.103
Hauptverfasser:	Berman-Mendoza, Dainet, Aceves-Mijares, Mariano, Berriel-Valdos, Luis Raul, Carranza, Jazmin, Pedraza, Jorge, Dominguez-Horna, Carlos, Falcony, Ciro
Format:	Magazinearticle
Sprache:	eng
Schlagworte:	Chemical vapor deposition Nanocrystals Nanotechnology Sensitivity Silicon Silicon compounds Ultraviolet radiation
Online-Zugang:	Volltext
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