Silicon-rich silicon oxide films boost UV sensitivity

Silicon-rich silicon oxide films boost UV sensitivity

Berman-Mendoza et al discuss how silicon-rich silicon oxide (SRO) films boost UV sensitivity. They develop a UV silicon detector made of Si and SRO that shows high efficiency and is completely compatible with silicon fabrication technology. When irradiated with UV light, the SRO film in the detector...

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Veröffentlicht in:Laser focus world 2005-09, Vol.41 (9), p.103
Hauptverfasser: Berman-Mendoza, Dainet, Aceves-Mijares, Mariano, Berriel-Valdos, Luis Raul, Carranza, Jazmin, Pedraza, Jorge, Dominguez-Horna, Carlos, Falcony, Ciro
Format: Magazinearticle
Sprache:eng
Schlagworte:
Chemical vapor deposition
Nanocrystals
Nanotechnology
Sensitivity
Silicon
Silicon compounds
Ultraviolet radiation
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Zusammenfassung:Berman-Mendoza et al discuss how silicon-rich silicon oxide (SRO) films boost UV sensitivity. They develop a UV silicon detector made of Si and SRO that shows high efficiency and is completely compatible with silicon fabrication technology. When irradiated with UV light, the SRO film in the detector emits IR and visible light that is absorbed by the p-n silicon photodetector, which generates a photocurrent proportional to the UV radiation.
ISSN:1043-8092