On the theory of MIS capacitance

A theory of MIS capacitance taking into account the two-band situation in the space-charge region is presented. The simple and universal C-formulas can be used for extrinsic as well as for intrinsic semiconductor in arbitrary (excluding degeneracy or quantization) band bending near the interface. Pr...

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Veröffentlicht in:Solid-state electronics 1976-01, Vol.19 (9), p.745-758
1. Verfasser: Nakhmanson, R.S.
Format: Artikel
Sprache:eng
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Zusammenfassung:A theory of MIS capacitance taking into account the two-band situation in the space-charge region is presented. The simple and universal C-formulas can be used for extrinsic as well as for intrinsic semiconductor in arbitrary (excluding degeneracy or quantization) band bending near the interface. Previous results are obtained in a more clear and conventient way and are extended to arbitrary steady-state conditions.
ISSN:0038-1101
1879-2405
DOI:10.1016/0038-1101(76)90153-2